@conference{aufsatz32243,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Residual Layer Free Polymer Waveguides And Microring Resonators Realized With UV-assisted Nanoimprint},
    journal = {Proc. 9th International Conference on Nanoimprint and Nanoprint Technology},
    keywords = {Nanoimprint},
    pages = {88--89},
    year = {2010},
    peerreview = {Ja},
    author = {Kirchner, R. and Kullock, R. and Eng, L. M. and Fischer, W.-J.}
}