@article{aufsatz32244,
    affiliation = {Professur für Halbleitertechnik},
    title = {Electrical characterisation of HfYO MIM-structures deposited by ALD},
    journal = {Thin Solid Films},
    keywords = {-},
    pages = {4680--4683},
    year = {2010},
    peerreview = {Ja},
    volume = {518},
    doi = {doi: 10.1016/j.tsf.2009.12.058},
    author = {Roessler, T. and Gluch, J. and Albert, M. and Bartha, J.W.}
}