BibTex - Publikationen
@article{aufsatz32245,
    affiliation = {Professur für Halbleitertechnik},
    title = {Atomic Layer Deposition of Ta-N-Based Thin Films Using a Tantalum Source},
    journal = {Journal of The Electrochemical Society},
    keywords = {ALD},
    pages = {638--642},
    year = {2010},
    peerreview = {Ja},
    volume = {157},
    doi = {doi:10.1149/1.3353230},
    author = {Schmidt, D. and Knaut, M. and Hossbach, C. and Albert, M. and Hintze, B. and Dussarrat, C. and Bartha, J.W.}
}