@conference{aufsatz32253,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-situ analysis of ultra thin ALD capacitor stacks for novel applications},
    journal = {Proceeding of AVS ALD Conference 2010, Seoul, Korea},
    keywords = {ALD, in-situ Analytics, XPS, QCM, QMS, SE},
    year = {2010},
    peerreview = {Ja},
    author = {Knaut, M. and Geidel, M. and Junige, M. and Krause, M. and Albert, M. and Bartha, J.W.}
}