@conference{aufsatz32254,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-situ characterization of ruthenium and ruthenium dioxide film growth},
    journal = {Proceeding of Baltic ALD / GerALD Conference 2010, Hamburg, Germany},
    keywords = {ALD, ruthenium, in-situ analytics, XPS, QMS, SE},
    year = {2010},
    peerreview = {Ja},
    author = {Junige, M. and Knaut, M. and Geidel, M. and Albert, M. and Bartha, J.W.}
}