@conference{aufsatz32255,
    affiliation = {Professur für Halbleitertechnik},
    title = {Ultra-thin AlxTi1-xOy films deposited by atomic layer deposition for DRAM capacitors and quantum devices},
    journal = {Proceeding of Nanofair Conference 2010, Dresden, Germany},
    keywords = {ALD, in-situ Analytics, XPS, QCM},
    year = {2010},
    peerreview = {Ja},
    author = {Knaut, M. and Geidel, M. and Krause, M. and Albert, M. and Bartha, J.W.}
}