@article{aufsatz32257,
    affiliation = {Professur für Halbleitertechnik},
    title = {Temperature dependence of the sticking coefficient in atomic layer deposition},
    journal = {Applied Surface Science},
    keywords = {Atomic layer deposition, Sticking coefficient, Temperature dependence, Deep trench, Simulation, TEMAHf},
    pages = {3778--3782},
    year = {2010},
    peerreview = {Ja},
    volume = {256},
    doi = {10.1016/j.apsusc.2010.01.025},
    author = {Rose, M. and Bartha, J.W. and Endler, I.}
}