@article{aufsatz32260,
    affiliation = {Professur für Halbleitertechnik},
    title = {Atomic Layer Deposition of Titanium Dioxide Thin Films from Cp*Ti(OMe)3},
    journal = {J. Phys. Chem. C 2009},
    keywords = {Atomic Layer Deposition},
    pages = {21825--21830},
    year = {2009},
    peerreview = {Ja},
    volume = {113},
    doi = {10.1021/jp907940u},
    author = {Rose, M. and Niinistö, J. and Michalowski, P. and Gerlich, L. and Wilde, L. and Endler, I. and Bartha, J.W.}
}