BibTex - Publikationen
@article{aufsatz32261,
    affiliation = {Professur für Halbleitertechnik},
    title = {Resolution and total blur: Correlation and focus dependencies in e-beam lithography},
    journal = {J. Vac. Sci. Technol.},
    keywords = {e-beam lithography},
    pages = {2722--2725},
    year = {2009},
    peerreview = {Ja},
    volume = {B27},
    number = {6},
    doi = {10.1116/1.3246365},
    author = {Keil, K. and Hauptmann, M. and Kretz, J. and Constancias, C. and Pain, L. and Bartha, J.W.}
}