@conference{aufsatz32383,
    affiliation = {Professur für Halbleitertechnik},
    title = {Investigation of the influence of oxygen plasma on the copper surface},
    journal = {Posterbeitrag zur 12th International Conference on Plasma Surface Engineering PSE 2010 13. - 17. 9. 2010, Garmisch-Partenkirchen; Proceedings PSE 2010},
    keywords = {-},
    year = {2010},
    peerreview = {Ja},
    author = {Richter, K. and Kubasch, C. and Bartha, J.W.}
}