@conference{aufsatz33151,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Adhesive porous DLC-coatings by modified PECVD process},
    journal = {Proc. Of Diamond 2010, 5-9 September 2010, Budapest, Hungary },
    keywords = {-},
    year = {2010},
    peerreview = {Ja},
    author = {Schütz, A. and Heeg, J. and Adolphi, B. and Katashev, A. and Barfels, T. and Wienecke, M.}
}