@conference{aufsatz33152,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Deposition of PZT Thin Films on Copper-coated Polymer Substrates by Means of Reactive Sputtering},
    journal = {Proc of ElectroceramicsXII 13-16 of June, 2010, Trondheim},
    keywords = {-},
    year = {2010},
    peerreview = {Ja},
    author = {Suchaneck, G. and Volkonskiy, O. and Lewin, A. and Adolphi, B. and Gerlach, G.}
}