@conference{aufsatz33840,
    affiliation = {Professur für Halbleitertechnik},
    title = {Evaluation of the Novel Iridium Precursor Ir(EtCp)(MeCHD) for ALD of Iridium Thin Films},
    journal = {Proceeding of Baltic ALD / GerALD Conference 2010, Hamburg, Germany (2010)},
    keywords = {-},
    year = {2010},
    peerreview = {Nein},
    author = {Hossbach, C. and Henke, T. and Gatineau, J. and Zauner, A. and Strehle, S. and Knaut, M. and Bertram, M. and Geidel, M. and Schmiegel, C. and Albert, M. and Gluch, J. and Neidhardt, J. and Bartha, J.W.}
}