@conference{aufsatz35104,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-situ spectroscopic ellipsometry during the atomic layer deposition of ruthenium and ruthenium oxide},
    journal = {3rd NanoCharm Workshop on Non-Destructive Real Time Process Control. Berlin, 2010},
    keywords = {-},
    year = {2010},
    peerreview = {Nein},
    author = {Junige, M. and Knaut, M. and Geidel, M. and Albert, M. and Bartha, J.W.}
}