@conference{aufsatz35110,
    affiliation = {Professur für Halbleitertechnik},
    title = {Remote Plasma Enhanced Atomic Layer Deposition of Tantalum Nitride using TBTDET and Atomic Hydrogen},
    journal = {Baltic ALD Conference, Oslo, Norwegen},
    keywords = {-},
    year = {2007},
    peerreview = {Nein},
    author = {Hossbach, C. and Schmidt, D. and Albert, M. and Adolphi, B. and Bartha, J.W.}
}