@conference{aufsatz37453,
    affiliation = {Professur für Halbleitertechnik},
    title = {SiGe channels for higher mobility CMOS devices},
    journal = {MRS Proceedings 1194E},
    keywords = {-},
    pages = {26--33},
    year = {2010},
    peerreview = {Ja},
    author = {Naumann, A. and Kelwing, T. and Trentzsch, M. and Kronholz, S. and Kammler, T. and Flachowsky, S. and Herrmann, T. and Kücher, P. and Bartha, J.W.}
}