@conference{aufsatz37477,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Multilayer Nano-Imprint-Lithography Mold Fabrication Process},
    journal = {Proc. 3. GMM-Workshop Mikro-Nano-Integration, 2.-4.3.2011, Stuttgart},
    keywords = {-},
    pages = {8--12},
    isbn = {978-3-8007-3334-7},
    year = {2011},
    peerreview = {Nein},
    openaccess = {Nein},
    volume = {GMM Fachbericht 68},
    author = {Finn, A. and Jahn, A. and Kirchner, R. and Künzelmann, U. and He, J. and Wägner, M. and Fischer, W.-J.}
}