BibTex - Publikationen
@article{aufsatz37518,
    affiliation = {Professur für Halbleitertechnik},
    title = {Growth of the Initial Atomic Layers of Ta-N Films During Atomic Layer Deposition on Silicon-Based Substrates},
    journal = {Chemical Vapor Deposition 17},
    keywords = {-},
    pages = {37--44},
    year = {2011},
    peerreview = {Ja},
    author = {Strehle, S. and Schmidt, D. and Albert, M. and Bartha, J.W.}
}