@article{aufsatz37518,
affiliation = {Professur für Halbleitertechnik},
title = {Growth of the Initial Atomic Layers of Ta-N Films During Atomic Layer Deposition on Silicon-Based Substrates},
journal = {Chemical Vapor Deposition 17},
keywords = {-},
pages = {37--44},
year = {2011},
peerreview = {Ja},
author = {Strehle, S. and Schmidt, D. and Albert, M. and Bartha, J.W.}
}