@article{aufsatz37688,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {UV-Nanoimprinting Using Non-Transparent Molds and Non-Transparent Substrates},
    journal = {Microelectronic Engineering, 88(8):20042008, August 2011},
    keywords = {Nanoimprinting},
    pages = {1--5},
    year = {2011},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {DOI 10.1016/j.mee.2011.01.066},
    author = {Kirchner, R. and Finn, A. and Teng, L. and Plötner, M. and Jahn, A. and Nueske, L. and Fischer, W.-J.}
}