BibTex - Publikationen
@article{aufsatz37984,
    affiliation = {Professur für Halbleitertechnik},
    title = {Fourier Transform Infrared Spectroscopy of Moisturized Low-k Dielectric Materials},
    journal = {Electron Devices, IEEE Transactions on},
    keywords = {Infrared spectroscopy, low- κ materials, moisture uptake},
    pages = {2888--2894},
    year = {2011},
    peerreview = {Ja},
    openaccess = {Ja},
    volume = {58},
    number = {9},
    author = {Kubasch, C. and Schumacher, H. and Ruelke, H. and Mayer, U. and Bartha, J.W.}
}