@conference{aufsatz37985,
    affiliation = {Professur für Halbleitertechnik},
    title = {Fundamental relationship between capacitance-time measurements and gravimetric measurements for water absorption in a low-k dielectric},
    journal = { Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International},
    keywords = {-},
    pages = {1--3},
    year = {2011},
    peerreview = {Nein},
    author = {Kubasch, C. and Bartha, J.W.}
}