@conference{aufsatz37986,
    affiliation = {Professur für Halbleitertechnik},
    title = {Dynamic High Rate Deposition of Microcrystalline Silicon with Very High Excitation Frequencies (80-150MHz) Using Linear Plasma Sources},
    journal = {Proceedings of 26th European Photovoltaic Solar Energy Conference and Exhibition (2011)},
    keywords = {-},
    pages = {2499--2501},
    year = {2011},
    peerreview = {Nein},
    author = {Strobel, C. and Leszczynska, B. and Albert, M. and Bartha, J.W. and Zimmermann, T. and Kuske, J.}
}