@conference{aufsatz38144,
    affiliation = {Professur für Halbleitertechnik},
    title = {Monitoring atomic layer deposition processes in situ and in real-time by spectroscopic ellipsometry},
    journal = {IEEE 2011 Semiconductor Conference Dresden : September 27 to 28, 2011 - Dresden, Germany. Dresden, 2011},
    keywords = {-},
    isbn = {978-1-4577-0429-1},
    year = {2011},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Junige, M. and Geidel, M. and Knaut, M. and Albert, M. and Bartha, J.W.}
}