@conference{aufsatz38147,
    affiliation = {Professur für Halbleitertechnik},
    title = {In situ monitoring for ALD process control},
    journal = {AVS 11th International Conference on Atomic Layer Deposition : June 26 – 29, 2011, Cambridge, Massachusetts, USA. Boston, 2011},
    keywords = {-},
    year = {2011},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Bartha, J.W. and Knaut, M. and Junige, M. and Geidel, M. and Albert, M.}
}