@conference{aufsatz38186,
    affiliation = {Professur für Halbleitertechnik},
    title = {Dynamic VHF-PECVD technique for flexible substrate coating},
    journal = {Proc. of the 54th Annual SVC Technical Conference, Chicago 2011},
    keywords = {-},
    year = {2011},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Leszczynska, B. and Strobel, C. and Albert, M. and Zimmermann, T. and Kuske, J. and Bartha, J.W.}
}