@conference{aufsatz38187,
    affiliation = {Professur für Halbleitertechnik},
    title = {Influence of excitation frequencies (81.36 – 120 MHz) in the VHF – PECVD technique on the deposition rate and properties of silicon thin-film solar cells},
    journal = {Proc. of the 26th European Photovoltaic Solar Energy Conference, Hamburg 2011},
    keywords = {-},
    year = {2011},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Leszczynska, B. and Strobel, C. and Albert, M. and Bartha, J.W. and Stephan, U. and Kuske, J.}
}