@conference{aufsatz38188,
    affiliation = {Professur für Halbleitertechnik},
    title = {A Through Silicon Via concept for sensor applications},
    journal = {Semiconductor Conference Dresden (SCD), 27-28 Sept. 2011},
    keywords = {-},
    isbn = {978-1-4577-0431-4},
    year = {2011},
    peerreview = {Nein},
    openaccess = {Nein},
    doi = {Digital Object Identifier: 10.1109/SCD.2011.6068771},
    author = {Neumann, V. and Hiess, A. and Jahn, A. and Merkel, U. and Richter, K. and Viehweger, K. and Wenzel, C. and Bartha, J.W.}
}