@conference{aufsatz38190,
    affiliation = {Professur für Halbleitertechnik},
    title = {Flash-ALD - A Novel Approach for Atomic Layer Controlled Growth of Thin Films Induced by Flash Heating},
    journal = {Proceedings of AVS 11th International Conference on Atomic Layer Deposition, June 26 – 29, 2011, Cambridge, Massachusetts, USA},
    keywords = {Atomic Layer Deposition, Flash Heating},
    year = {2011},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Henke, T. and Geidel, M. and Knaut, M. and Albert, M. and Bartha, J.W.}
}