@conference{aufsatz38192,
    affiliation = {Professur für Halbleitertechnik},
    title = {Flash Light Induced Atomic Layer Deposition},
    journal = {Subtherm 2011 – International Topical Workshop on Subsecond Thermal Processing of Advanced Materials, October 25 – 27, 2011, Dresden},
    keywords = {Atomic Layer Deposition, Flash Heating},
    year = {2011},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Henke, T. and Geidel, M. and Knaut, M. and Albert, M. and Bartha, J.W.}
}