@conference{aufsatz38239,
    affiliation = {Professur für Halbleitertechnik},
    title = {QCM sensors for advanced process development and control},
    journal = {Proceedings of 11th AVS ALD Conference, Cambridge, Massachusetts, USA},
    keywords = {ALD, in-situ analytics, QCM, process control},
    year = {2011},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Knaut, M. and Albert, M. and Bartha, J.W.}
}