@conference{aufsatz38240,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-situ analytics for development and control of atomic layer deposition processes},
    journal = {11th European Advanced Equipment Control/Advanced Process Control (AEC/APC) Conference},
    keywords = {ALD, in-situ analytics, QCM, XPS, QMS, SE, process development, process control},
    year = {2011},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Knaut, M. and Albert, M. and Bartha, J.W.}
}