BibTex - Publikationen
@conference{aufsatz38242,
    affiliation = {Professur für Halbleitertechnik},
    title = {RF-Magnetron Sputtered Dielectric Backside Passivation},
    journal = {Proceedings of the 26th European Photovoltaic Solar Energy Conference, Hamburg},
    keywords = {Al2O3, SiO2, PVD, ALD, photovoltaic, solar cell passivation},
    year = {2011},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Benner, F. and Tarasova, M. and Moll, P. and Jakschik, S. and Dirnstorfer, I. and Knaut, M. and Mikolajick, T.}
}