@conference{aufsatz38242,
affiliation = {Professur für Halbleitertechnik},
title = {RF-Magnetron Sputtered Dielectric Backside Passivation},
journal = {Proceedings of the 26th European Photovoltaic Solar Energy Conference, Hamburg},
keywords = {Al2O3, SiO2, PVD, ALD, photovoltaic, solar cell passivation},
year = {2011},
peerreview = {Nein},
openaccess = {Nein},
author = {Benner, F. and Tarasova, M. and Moll, P. and Jakschik, S. and Dirnstorfer, I. and Knaut, M. and Mikolajick, T.}
}