@conference{aufsatz38312,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Characterisation of the Geometrical Properties of Multilayer Nano-Imprint-Lithography Molds for Optical Applications},
    journal = {Proc. 37th Int. Conf. on Microand Nano Engineering 2011 (MNE2011)},
    keywords = {-},
    year = {2011},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Finn, F. and Hagemann, F. and Hensel, R. and Kirchner, R. and Jahn, A. and Fischer, W.-J.}
}