@conference{aufsatz38313,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Stamp-and-Repeat UVImprinting of Spin-Coated Films: Pre-Exposure and Imprint Defects},
    journal = {Proc. 37th Int. Conf. on Micro and Nano Engineering 2011 (MNE2011),},
    keywords = {-},
    year = {2011},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Kirchner, R. and Nueske, L. and Finn, A. and Lu, B. and Fischer, W.-J.}
}