@conference{aufsatz38315,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {UV Nanoimprinting Using Non-Transparent Molds and Non-Transparent Substrates},
    journal = {Proc. 36th Int. Conf. on Micro and Nano Engineering 2010 (MNE2010), 2010.P-LITH-92},
    keywords = {-},
    year = {2010},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Kirchner, R. and Finn, A. and Teng, L. and Plötner, M. and Jahn, A. and Nueske, L. and Fischer, W.-J.}
}