@conference{aufsatz38675,
    affiliation = {Professur für Halbleitertechnik},
    title = {Dynamic VHF-PECVD Deposition with Linear Plasma Sources for Amorphous and Microcrystalline Silicon Solar Cells},
    journal = {Society of Vacuum Coaters(SVC), Technical Conference Proceedings, Chicago 2011},
    keywords = {-},
    year = {2011},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Albert, M. and Strobel, C. and Leszczynska, B. and Zimmermann, T. and Kuske, J. and Bartha, J.W.}
}