@article{aufsatz38704,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Degradation of Perfluorotrichlorosilane Antisticking Layers: The Impact on Mold Cleaning, UVNanoimprinting, and Bonded UV-Nanoimprint Molds},
    journal = {Jpn. J. Appl. Physics},
    keywords = {-},
    pages = {6--13},
    year = {2011},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {50},
    author = {Kirchner, R. and Teng, L. and Lu, B. and Adolphi, B. and Fischer, W.-J. }
}