@article{aufsatz38707,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Antisticking Layers on Antireflective Chromium for Hybrid (CNP) Nanoimprint Molds},
    journal = {Proc. SPIE},
    keywords = {-},
    pages = {7545},
    year = {2011},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {7545},
    author = {Kirchner, R. and Adolphi, B. and Landgraf, R. and Fischer, W.-J.}
}