@conference{aufsatz38716,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Degradation of Perfluorotrichlorosilane Antisticking Layers and the Impact on Bonded UV-Nanoimprint Molds, Mold Cleaning, and UV-Nanoimprinting},
    journal = {Proc. 23rd Internat. Microprocesses and Nanotechnology Conf., Kokura/Fukuoka, 09.-12.11},
    keywords = {-},
    year = {2011},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {Abstracts 12D-11-99},
    author = {Kirchner, R. and Teng, L. and Lu, B. and Adolphi, B. and Fischer, W.-J.}
}