@article{aufsatz38844,
    affiliation = {Professur für Halbleitertechnik},
    title = {Physical Characterization of PECVD and PEALD Ru(-C) Films and Comparison with PVD Ruthenium Film Properties},
    journal = {Journal of The Electrochemical Society},
    keywords = {-},
    pages = {166--176},
    year = {2012},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {159},
    number = {2},
    doi = {10.1149/2.066202jes },
    author = {Wojcik, H. and Junige, M. and Bartha, J.W. and Albert, M. and Neumann, V. and Merkel, U. and Peeva, A. and Gluch, J. and Menzel, S. and Munnik, F. and Liske, R. and Utess, D. and Richter, I. and Klein, C. and Engelmann, H.-J. and Hoßbach, C. and Wenzel, C.}
}