BibTex - Publikationen
@article{aufsatz43715,
    affiliation = {Professur für Halbleitertechnik},
    title = {Greenwood-Williamson Model Combining Pattern-Density and Pattern-Size Effects in CMP},
    journal = {IEEE Transactions on Semiconductor Manufacturing},
    keywords = {CMP, Greenwood-Williamson, pad roughness},
    pages = {338--347},
    year = {2011},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {24},
    number = {2},
    author = {Vasilev, B. and Rzehak, R. and Bott, S. and Kücher, P. and Bartha, J.W.}
}