@article{aufsatz43716,
affiliation = {Professur für Halbleitertechnik},
title = {A CMP Model Including Global Distribution of Pressure},
journal = {IEEE Transactions on Semiconductor Manufacturing},
keywords = {CMP, chip-scale, interaction},
pages = {304--314},
year = {2011},
peerreview = {Ja},
openaccess = {Nein},
volume = {24},
number = {2},
author = {Bott, S. and Rzehak, R. and Vasilev, B. and Kücher, P. and Bartha, J.W.}
}