BibTex - Publikationen
@article{aufsatz43716,
    affiliation = {Professur für Halbleitertechnik},
    title = {A CMP Model Including Global Distribution of Pressure},
    journal = {IEEE Transactions on Semiconductor Manufacturing},
    keywords = {CMP, chip-scale, interaction},
    pages = {304--314},
    year = {2011},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {24},
    number = {2},
    author = {Bott, S. and Rzehak, R. and Vasilev, B. and Kücher, P. and Bartha, J.W.}
}