@article{aufsatz43717,
    affiliation = {Professur für Halbleitertechnik},
    title = {Fabrication of silicon template with smooth tapered sidewall for nanoimprint lithography},
    journal = {J. Vac. Sci. Technol.},
    keywords = {-},
    year = {2011},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {B 29(6)},
    author = {He, J. and Richter, K. and Bartha, J.W. and Howitz, S.}
}