@article{aufsatz43785,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-situ real-time ellipsometric investigations during the atomic layer deposition of ruthenium: A process development from [(ethylcyclopentadienyl)(pyrrolyl)ruthenium] and molecular oxygen},
    journal = {Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 30 (2012), 01A151-01A151-9},
    keywords = {ALD, Ru, spectroscopic ellipsometry, process development, in-situ analytics},
    year = {2012},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {http://dx.doi.org/10.1116/1.3670405},
    author = {Knaut, M. and Junige, M. and Albert, M. and Bartha, J.W.}
}