@article{aufsatz43878,
    affiliation = {Professur für Halbleitertechnik},
    title = {Analysis of the energy input during wire coating from a cylindrical magnetron source},
    journal = {Thin Solid Films},
    keywords = {Wire coating, Sputter deposition, Energy input, Langmuir probe, TRIM},
    pages = {6404--6408},
    year = {2012},
    peerreview = {Ja},
    openaccess = {Ja},
    volume = {520},
    number = {20},
    doi = {DOI: 10.1016/j.tsf.2012.05.072},
    author = {Vogel, U. and Klaus, C. and Nobis, C. and Bartha, J.W.}
}