@article{aufsatz43923,
affiliation = {Professur für Mikrosystemtechnik},
title = {UV-based Nanoimprint Lithography: Towards Direct Patterning of Functional Polymers},
journal = {J. Photopolym. Sci. Technol.},
keywords = {-},
pages = {197--206},
year = {2012},
peerreview = {Ja},
openaccess = {Nein},
volume = {25/2},
author = {Kirchner, R. and Finn, A. and Landgraf, R. and Nueske, L. and Vogler, M. and Fischer, W.-J.}
}