@conference{aufsatz44117,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates},
    journal = {ISAF, Aveiro, Portugal, 9.-13-07.2012},
    keywords = {-},
    year = {2012},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Kleiner, A. and Suchaneck, G. and Adolphi, B. and Gerlach, G. and Lavrentiev, V. and Hubicka, Z. and Cada, M. and Jastrabik, L. and Dejneka, A.}
}