@conference{aufsatz44118,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Influence of Solvent Removal and UV-exposure on Feature Shrinkage in UV-NIL Direct Pattering},
    journal = {Proc. 11th Int. Conf. on Nanoimprint and Nanorprint Technology, 2012},
    keywords = {-},
    year = {2012},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Kirchner, R. and Finn, A. and Chares, A. and Vogler, M. and Fischer, W.-J.}
}