@conference{aufsatz44121,
    affiliation = {Professur für Halbleitertechnik},
    title = {Investigation of the c-Si/Al2O2 Interface for Silicon Surface Passivation},
    journal = {Proc. of the 27th European Photovoltaic Solar Energy Conferencse, Frankfurt},
    keywords = {Al2O3, ALD, silicon interface, photovoltaic, solar cell passivation},
    pages = {1793--1796},
    isbn = {3-936338-28-0},
    year = {2012},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {DOI: 10.4229/27thEUPVSEC2012-2CV.5.57},
    author = {Benner, F. and Jordan, Pa. M. and Knaut, M. and Dirnstorfer, D. and Bartha, J.W. and Mikolajick, T.}
}