@article{aufsatz44185,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Fabrication and characterization of sub-500 nm channel organic field effect transistor using UV nanoimprint lithography with cheap Si-mold},
    journal = {Microelectronic Engineering },
    keywords = {-},
    pages = {38--42},
    year = {2012},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {97},
    author = {Teng, L. and Kirchner, R. and Plötner, M. and Türke, A. and Jahn, A. and He, J. and Hagemann, F. and Fischer, W.-J.}
}